| 摘要 |
PURPOSE:To execute trimming for the functions of plural base plates at a time by controlling laser beam spectroscopes with a control means so that materials to be trimmed are irradiated with laser beam corresponding to the timing when the measurement of electric characteristics of the respective base plates is finished. CONSTITUTION:On a regulating stage 1, the electric characteristic of a base plate 2 is measured by a measuring part 6 and a material 1 to be trimmed is trimmed by the amt. corresponding to the result by the laser beam of the laser beam oscillator 4. The base plate 2 on the regulating stage 2, too, at the same time, begins to be measured with the electric characteristic and after trimming the base plate on the side of the regulating stage 1 is finished, a laser beam spectroscope 14 is changed over and the material 1 to be trimmed is trimmed by the laser beam of the laser beam oscillator 4. On other respective regulating stages (n), too, the electric characteristics are measured, controllers 5 manage the use of the laser beam oscillators 4, control the laser beam spectroscope 14 and the laser beam oscillators 4 are used by time division. |
