| 摘要 |
A misalignment tolerant antifuse includes a lower electrode (14), bounded by a relatively thick first insulating layer (16), an upper electrode (26) separated from the lower electrode by a second insulating layer (24) having a thickness less than that of the first insulating layer, a pair of antifuse window regions (20) in the second insulating layer, abutting the first insulating layer on opposite sides of the lower electrode, the insulating material in the window regions being thinner than the remainder of the second insulating layer, and an upper electrode disposed above the second insulating layer and lying over the pair of regions and at least a portion of the first insulating layer. <IMAGE> <IMAGE> |
