HORIZONTAL TYPE REACTOR FOR SEMICONDUCTOR MANUFACTURING,申请号JP19900309740-传众专利搜索

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发明名称	HORIZONTAL TYPE REACTOR FOR SEMICONDUCTOR MANUFACTURING
摘要
申请公布号	JPH04180619(A)	申请公布日期	1992.06.26
申请号	JP19900309740	申请日期	1990.11.15
申请人	NEC YAMAGATA LTD	发明人	SUGAWARA ICHIRO
分类号	H01L21/22;H01L21/205;H01L21/31	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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