发明名称 METHOD AND SENSOR FOR MEASURING LOW AIR PRESSURES
摘要 The object of the invention is a method and sensor (10) for measuring air pressure by means of a membrane (14) in such a way that air pressure is allowed to affect both sides of the membrane, whereupon the pressure difference between the different sides of the membrane can be measured. According to the invention air pressure is measured so that the sensor membrane (14) is kept in position by means of the electrostatic pressure created by an electric field, whereupon the intensity of the electric field required indicates the effective pressure difference. The sensor (10) comprises a device which keeps the membrane (14) in position by means of the electrostatic pressure created by an electric field, and a device which indicates the effective pressure difference on the basis of the intensity of the electric field required.
申请公布号 WO9210730(A1) 申请公布日期 1992.06.25
申请号 WO1991FI00289 申请日期 1991.09.23
申请人 PIETIKO OY 发明人 PIETILAE, URPO
分类号 G01L11/00 主分类号 G01L11/00
代理机构 代理人
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