发明名称 Latch for wafer storage box for manual or robot operation
摘要 A silicon wafer storage box must be secured by a functional and convenient latch during the fabrication and transportation of silicon wafers. The present invention encompasses such a functional, convenient latch adaptable for either manual or automated manipulation. The invention includes a rigid upper tab having a peg adapted for interaction with a robot arm of an automated process. The invention also includes a resiliently flexible bottom bight having a horizontally extending rigid lower tab, adapted for manual manipulation. The invention permits convenient, efficient manipulation of the latch by either a person or by an automated process.
申请公布号 US5123681(A) 申请公布日期 1992.06.23
申请号 US19910672467 申请日期 1991.03.20
申请人 FLUOROWARE, INC. 发明人 KOS, ROBERT D.;NIEBELING, TRACY J.;EGGUM, SHAWN D.
分类号 B65D45/20;B65D85/00;E05B51/00;E05C19/06;H01L21/673 主分类号 B65D45/20
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