发明名称 |
Latch for wafer storage box for manual or robot operation |
摘要 |
A silicon wafer storage box must be secured by a functional and convenient latch during the fabrication and transportation of silicon wafers. The present invention encompasses such a functional, convenient latch adaptable for either manual or automated manipulation. The invention includes a rigid upper tab having a peg adapted for interaction with a robot arm of an automated process. The invention also includes a resiliently flexible bottom bight having a horizontally extending rigid lower tab, adapted for manual manipulation. The invention permits convenient, efficient manipulation of the latch by either a person or by an automated process.
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申请公布号 |
US5123681(A) |
申请公布日期 |
1992.06.23 |
申请号 |
US19910672467 |
申请日期 |
1991.03.20 |
申请人 |
FLUOROWARE, INC. |
发明人 |
KOS, ROBERT D.;NIEBELING, TRACY J.;EGGUM, SHAWN D. |
分类号 |
B65D45/20;B65D85/00;E05B51/00;E05C19/06;H01L21/673 |
主分类号 |
B65D45/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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