FORMATION OF BORON NITRIDE FILM,申请号JP19900299780-传众专利搜索

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发明名称	FORMATION OF BORON NITRIDE FILM
摘要
申请公布号	JPH04173957(A)	申请公布日期	1992.06.22
申请号	JP19900299780	申请日期	1990.11.07
申请人	MITSUBISHI HEAVY IND LTD	发明人	WADA TETSUYOSHI;YAMASHITA NOBUKI;OGAWA MAKOTO;ROKKAKU TADASHI
分类号	C23C14/06;C23C14/32	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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