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发明名称
SEMICONDUCTOR PART EVALUATION JIG
摘要
申请公布号
JPH04171838(A)
申请公布日期
1992.06.19
申请号
JP19900301903
申请日期
1990.11.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAJIWARA KAZUNARI;TANAKA HIROBUMI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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