| 摘要 |
PURPOSE:To enable development by an alkalescent developing liquid speedily by forming a photosensitive compound of polymer or copolymer including a specified composition unit and diazo compound. CONSTITUTION:A photosensitive compound is composed of polymer or copolymer including a composition unit as expressed by Formula I, where R1 denotes hydrogen atom or methyl group. The polymer or copolymer includes binary, tertially or multiple copolymer composed of a compound as expressed by Formula II and another polymer unsaturated compound added. In Formula II, R1 denotes hydrogen atom or methyl group. It is thus possible to enable development by alkaluscent developing liquid. |
