METHOD OF MANUFACTURING FLUIDIC ANGULAR RATE SENSOR

摘要

A method of manufacturing a fluidic angular rate sensor of the type that fine wires such as tungsten wires are tensely spread over the heads of two pairs of metal supports which are mounted on a ceramic disc having fluid passage apertures, includes the steps of: plating a gold on the wires and fixedly spreading the wires over the metal supports by means of thermocompression bonding or the like; and heating the wires in a predetermined atmosphere which allows the plated gold to be removed and the wires to be crystallized.