发明名称 METHOD OF PRODUCING SEMICONDUCTOR DEVICE
摘要 A method of producing a semiconductor device includes bonding a semiconductor chip to a die pad of a lead frame by means of a silicone resin, to bonding a copper wire and an aluminum electrode of the semiconductor chip in such a manner that intermetallic compound mainly consisting of CuAl2 is formed in the bonding region. This method suppresses the deterioration of the copper-aluminum alloy layer and these semiconductor devices have a high reliability at a high temperature, as well as uniform quality in the production.
申请公布号 US5116783(A) 申请公布日期 1992.05.26
申请号 US19890392553 申请日期 1989.08.11
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TSUMURA, KIYOAKI
分类号 H01L21/60;H01L21/603 主分类号 H01L21/60
代理机构 代理人
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