| 摘要 |
PURPOSE:To improve preliminary electronic dissociation efficiency and simplify the apparatus by coaxially coupling a laser oscillator for preliminary electronic dissociation and a main laser oscillator with an optical device operating also for output mirror and reflecting mirror thereof and reflecting the main laser beam with high efficiency for the laser beam for preliminary electronic dissociation. CONSTITUTION:Discharge electrodes 24, 25 discharge with the predetermined operation, the generated laser beam for preliminary electronic dissociation optically resonates between optical devices 32, 33 and thereby the discharge space of the main electrodes 28, 29 are preliminarily dissociated. After the predetermined period, the main electrodes 28, 29 discharge and the main laser beam L optical resonates between optical devices 31, 33 and then outputted from an optical device 33. Here, the laser beam for dissociation introduced into the main laser oscillator is reflected effectuating on the preliminary electronic dissociation. Thereby, since the electronic dissociation is carried out until the laser beam for dissociation disappears within the laser bulb, preliminary electrolytic dissociation efficiency becomes high, and since there is no other output than the main laser beam, it is no longer necessary to separate the waveform and the device can be as much simplified. |
