DRY-ETCHING METHOD,申请号JP19900265234-传众专利搜索

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发明名称	DRY-ETCHING METHOD
摘要
申请公布号	JPH04142738(A)	申请公布日期	1992.05.15
申请号	JP19900265234	申请日期	1990.10.04
申请人	SONY CORP	发明人	KADOMURA SHINGO
分类号	H01L21/302;G03F7/36;H01L21/027;H01L21/3065;H01L21/311;H01L21/3213	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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