DISTANCE MEASURING DEVICE

摘要

An electro-optic distance or profile measuring device employing a confocal microscope which is confocal in one dimension with an astigmatic light energy beam focused so as to intersect a surface under examination at at least one point. The light energy scattered by the surface is imaged onto a detector whereby analysis of the image intensity distribution provides a measure of the distance from a reference point to the point of contact between the focused line of light energy and the surface.