| 摘要 |
1,153,510. Vacuum furnaces. BALZERS PATENT-UND BETEILIGUNGS A.G. 29 Dec., 1967 [13 Jan., 1967], No. 59052/67. Heading F4B. Vacuum vapour deposition plant comprises a vacuum pump chamber 1 connected via a port 2, baffle chamber 5 and ring 16 to a bell 4 on a base 3, the components above chamber 1 being surrounded by a double walled heating hood 11 with electric heating elements 12, 13, 14 and 15 for desorption purposes. The bell 4 is connected by arms 7 to a carbon slide rod 8 actuated by a pneumatic or hydraulic motor 9. |
