| 摘要 |
PURPOSE:To realize small and a high resolving power efficiency by arranging an ejecting unit and a measuring unit to move together along the circumference of a Rowland circle of a diffraction grating. CONSTITUTION:When a pulse laser beam source 9 irradiates a target 6, a soft X-ray 36 is generated from plasma of the target 6. The soft X-ray permeates into a diffraction grating 16 to be a spectrum. A soft X-ray 37 which is transformed into the spectrum at the diffraction grating 16 permeates into a specimen (S), then a soft X-ray 38 is detected by a soft X-ray detector 23. When an ejecting slit 20 is caused to move by a movement of a seating 19, wavelength scanning is performed. Thus, a spectral reflectance and the like of specimen (S) can be measured. In addition, the soft X-ray 38 of the specimen (S) can be detected at a desired diffraction angle by rotating a detector 23 around a specimen table 22. |
