| 摘要 |
PURPOSE:To obtain an X-ray window material superior in an X-ray transmission factor, strength and heat strain by forming a reinforcing machine composed of diamond of the same quality as an X-ray transmission film with the aid of the selection growth of the diamond in part of the X-ray transmission film of the diamond. CONSTITUTION:A base substance endures high temperature of 400 deg.C or higher at which it becomes a base board of diamond growth. In addition, materials easy to perform etching capable of removing a part or the whole of diamond after the diamond growth, such as a semiconductor of Si, Ge and GaAs and high temperature melting material such as Mo and W are used. For instance, methane and hydrogen are made raw material gas by the use of the CVD method, and diamond film is grown on the one side of the base substance. A reinforcing machine of diamond is grown in intervals of about 50mum by the use of through a metal mask as Mo and a diamond growth prevention mask. Next the diamond growth prevention mask is removed with the use of potassium hydroxide aqueous solution to leave the reinforcing machine. The peripheral part and side circumferential part of the base substance is covered with a photoresist and the base substance of the central part is melted to remove with the use of fluorine nitric acid. The X-ray window material obtained is attached to an aluminium made mounting frame.
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