| 摘要 |
<p>PURPOSE:To efficiently remove harmful gases without remarkably increasing a pressure drop by partly arranging a chemical filter for removing harmful gases below a suction surface and passing a part of the room air passing through the suction surface through the chemical filter. CONSTITUTION:The air contaminated with the harmful gases generated in a clean room is passed through a floor grating 62 and then partly passes through the chemical filters 76, 76,... of the chemical filter unit 64. At this time, the harmful gases in the air are adsorbed and removed by activated carbon and removed. Since the harmful gases are removed from the air immediately after passing through the grating 16, the diffusion of the harmful gases is prevented, and the harmful gases in the air are efficiently removed. Furthermore, the remaining air passing through the grating 62 is passed through plural air passages 77, 77,... formed in the unit 64, the whole air is not passed through the filters 76, 76,..., and the pressure drop is reduced.</p> |
