发明名称 Lateral MOS FET and manufacturing method thereof.
摘要 <p>In a lateral MOS FET, a back gate region a part of whose surface is a channel region is formed to surround the drain region, while being in contact with a part of the periphery of the drain region. With this configuration, if a high voltage electrostatic surge invades the drain electrode, a surge current will disperse from the drain region toward the surrounding back gate region. As a result, a rise in the electric potential at the drain region is suppressed smaller. Thus the electric potential hardly exceed the dielectric strength of the gate insulating film, thereby suppressing a breakdown of the gate insulating film and an electrostatic breakdown of the device. &lt;IMAGE&gt; &lt;IMAGE&gt;</p>
申请公布号 EP0481454(A2) 申请公布日期 1992.04.22
申请号 EP19910117653 申请日期 1991.10.16
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHIRAI, KOJI
分类号 H01L29/78;H01L21/336;H01L29/10;H01L29/423 主分类号 H01L29/78
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