摘要 |
<p>PURPOSE:To enable pads formed on a semiconductor substrate to be enhanced in number and remarkably improved in utilization factor by a method wherein input-output cells are provided to both the front and the rear of the semiconductor substrate. CONSTITUTION:A semi-custom semiconductor device is provided with pads 103 of metal or semiconductor, input-output cells 104 located adjacent to the pads 103, and through-grooves 105 provided onto the front and the rear of a substrate 102, where inner cells 101 located on the front of the semiconductor substrate 102 and the input-output cells 104 located on the rear of the substrate 102 are connected with aluminum wirings 301 through the through-grooves 105. The data of the through-grooves 105 are inputted when a mask is formed. The aluminum wirings 301 which connect the cells on the front and the input- output cells on the rear together are formed of optional conductive material.</p> |