| 摘要 |
PURPOSE:To easily liberate a gaseous substance generated from a green sheet, especially reactive products evaporating in a molten state by providing through- holes or grooves in a flat surface at least of loading plate of a jig for firing consisting of a loading plate having a flat surface pressing the green sheet. CONSTITUTION:A green sheet 6 consisting of aluminium nitride powder is placed on the flat-ground surface of a supporting board 5 consisting of, for instance, boron nitride to press the green sheet 6, by a loading plate 1. The green sheet 6 in this state is fired in the atmosphere of gas nitride at 1800 deg.C for about 9 hours. Further, the green sheet 6 is that where several to ten and several single green sheets of about 0.3mm consisting by containing a Ca compound as firing assistant auxiliaries, polyvinyl butylar as a binder, further ethanol as a solvent, are laminated followed by being pressed. Vapor of molten sintering assistant auxiliaries and reactive products generated from the green sheet 6 in firing is easily liberated into the atmosphere through the through-holes 2 or the grooves 3 so as not to influence the surface condition and warping. |
