| 摘要 |
PURPOSE:To achieve a highly accurate positioning by emitting an optical beam to a side surface between a reference object and an optical element and measuring a relative displacement and then moving at least one of the reference object and the optical element based on this measurement result in a specified direction. CONSTITUTION:A parallelism/displacement measuring device 11 emits a laser optical beam BM to a side surface 2a of an optical element 2 and a side surface 4a of a base mount 4, detects light which is reflected from the side surfaces 2a and 4a, measures parallelism of both side surfaces 2a and 4a from this detection result, concretely speaking a relative rotary angle for rotating air forceps 1 for maintaining both side surfaces 2a and 4a to be in parallel, and then displays it at a display part. Also, in a similar manner, the laser optical beam BM is emitted to the side surface 2a of the optical element 2 and the side surface 4a of the base mount 4, light which is reflected from the side surfaces 2a and 4a is detected, and the relative displacement quantity DELTAx between the optical element 2 and the base mount 4 is measured. Positioning of the optical element 2 in x and y directions is performed by moving the air forceps 1 in x and y directions by a forceps traveling rotary device 3 based on the relative displacement quantity DELTAx. |
