发明名称 |
Support and seal structure for CCVD reactor |
摘要 |
Reaction gases are prevented from escaping from a reaction chamber through the use of flexible or gas seals between the interface of the reaction chamber and the junction used to connected successive reaction chambers.
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申请公布号 |
US5105762(A) |
申请公布日期 |
1992.04.21 |
申请号 |
US19910674417 |
申请日期 |
1991.03.22 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WILKINSON, THOMAS F. |
分类号 |
C23C16/54;H01L21/00 |
主分类号 |
C23C16/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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