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发明名称
METHOD FOR CHARGED PARTICLE BEAM DRAWING
摘要
申请公布号
JPH04115519(A)
申请公布日期
1992.04.16
申请号
JP19900234843
申请日期
1990.09.05
申请人
JEOL LTD
发明人
SATO HITOSHI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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