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发明名称
FOREIGN MATERIAL DETECTOR
摘要
申请公布号
JPH04107839(A)
申请公布日期
1992.04.09
申请号
JP19900226181
申请日期
1990.08.28
申请人
NEC CORP
发明人
INAI MAKOTO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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