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发明名称
EXPOSURE LIGHT SOURCE DEVICE
摘要
申请公布号
JPH04106835(A)
申请公布日期
1992.04.08
申请号
JP19900224699
申请日期
1990.08.27
申请人
TOSHIBA CORP
发明人
OTAKE YASUHISA;MAGAKI YASUSHI;KITA NOBUO
分类号
G03F7/20;H01J9/14
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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