Sensor for atomic force raster microscope - has opto-electronic distance measurer for ascertaining movement of probe tip at distal end of extendable arm

摘要

The sensor has a flexible guidable probe arm (12) and an opto-electronic dustance measuring device (8) to measure the movement of a probe tip (26) attached to the free end of the probe arm (12). The arm and measuring device form a single unit and are attached to a common plate (1). The arm is movable in the plane of the plate (1). The probe tip points away from the plate. A measuring light beam from the measuring device is directed to a mirror (27) on the end of the arm. The plate comprises light conductive material or has a light conductive layer. USE/ADVANTAGE - Inexpensive compact system which can be used in many different applications. Produces an accurate image which can be displayed on a screen.