COATINGS FOR MICROELECTRONIC DEVICES AND SUBSTRATES,申请号EP19910300701-传众专利搜索

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发明名称	COATINGS FOR MICROELECTRONIC DEVICES AND SUBSTRATES
摘要
申请公布号	EP0442632(A3)	申请公布日期	1992.04.01
申请号	EP19910300701	申请日期	1991.01.30
申请人	DOW CORNING CORPORATION	发明人	HALUSKA, LOREN ANDREW
分类号	C23C18/12;C04B41/45;C04B41/52;H01L21/314;H01L21/48;(IPC1-7):H01L21/314	主分类号	C23C18/12
代理机构		代理人
主权项
地址

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