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发明名称
WAFER TRANSFER PART FOR SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH0498849(A)
申请公布日期
1992.03.31
申请号
JP19900216099
申请日期
1990.08.16
申请人
NEC YAMAGATA LTD
发明人
NAGANAMI JUNICHI
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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