发明名称 BEAM POSITION DETECTOR
摘要 PURPOSE:To increase the extent of position detecting sensitivity by installing a fluorescent X-ray radiator on an optical axis of synchrotron radiation light, detecting the fluorescent X-ray being emitted with two detectors each, and finding a beam position from each output signal. CONSTITUTION:A copper rod 1 or a fluorescent X-ray radiator makes an angle on an optical axis acute with a triangular section doubling as a linear symmetry to the optical axis of synchrotron radiation light correctly irradiates the copper rod 1 without entailing any dislocation, each quantity of both first and second fluorescent X-rays being detected by first and second detectors 2, 3 is the same, so that each of output signals (a), (b) of these two detectors 2, 3 becomes equalized. Accordingly, with an output signal out of an arithmetic circuit 4 monitored, a beam position of the synchrotron radiation light is accurately detectable.
申请公布号 JPH0493686(A) 申请公布日期 1992.03.26
申请号 JP19900206707 申请日期 1990.08.06
申请人 CANON INC 发明人 MIYAKE AKIRA;AMAMIYA MITSUAKI;WATANABE YUTAKA
分类号 G01J1/00;G01J1/02;G01T1/29 主分类号 G01J1/00
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