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发明名称
MASTER SLICE
摘要
申请公布号
JPH0485959(A)
申请公布日期
1992.03.18
申请号
JP19900201756
申请日期
1990.07.30
申请人
NEC CORP
发明人
KURIYAMA ATSUSHI
分类号
H01L27/118;H01L21/82
主分类号
H01L27/118
代理机构
代理人
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