| 摘要 |
PURPOSE:To enable extremely easy exchanging of a laser window and to immediately start operation again by inserting a ball bulb in the middle of a connection body, by making the ball bulb form a communicating path in a sphere arranged airtightly to rotate freely inside a path, by making rotation of the sphere cause rotation of the communicating path and by opening and closing the path in this way. CONSTITUTION:When a laser window 2 is exchanged, a sphere 6 provided to the middle of a connection body (a) is rotated from the outside and an communicating path 7 of a ball bulb 4 is made to form a right angle to a path 5. In the process, the path 5 is closed by the sphere 6. Since an inside of a laser chamber main body 1 and a laser window 2 are closed in the state, the laser window 2 is removed and a new laser window 2 is mounted. Thereafter, a communicating path 7 of the ball bulb 4 is communicated to the path 5 and exchanging operation is finished. Therefore, there is no possibility that air comes to direct contact with the inside of the laser chamber main body 1 and that the inside of the laser chamber main body 1 is contaminated. |
