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发明名称
ION IMPLANTER
摘要
申请公布号
JPH01232653(A)
申请公布日期
1989.09.18
申请号
JP19880058360
申请日期
1988.03.14
申请人
OKI ELECTRIC IND CO LTD
发明人
YAMAGUCHI KAZUO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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