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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH0471231(A)
申请公布日期
1992.03.05
申请号
JP19900182598
申请日期
1990.07.12
申请人
OKI ELECTRIC IND CO LTD
发明人
KAGEYAMA MAKIKO;TETSUDA HIROSHI
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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