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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0234924(A)
申请公布日期
1990.02.05
申请号
JP19880184988
申请日期
1988.07.25
申请人
MATSUSHITA ELECTRON CORP
发明人
MATSUO HIROMI
分类号
H01L21/22;H01L21/20;H01L21/306
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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