| 摘要 |
PURPOSE:To continuously produce homogeneous ceramic fine powder in large amt. by irradiating the ceramic source material dissolved in a solvent with UV laser light. CONSTITUTION:A reaction chamber 2 such as quartz which is transparent for UV laser light is irradiated with UV laser light. The ceramic source material in a dissolved state in a liquid phase is continuously supplied from the source material supplier 1 to the reaction chamber 2 to produce a fine powder material in the chamber. The obtd, fine powder is discharged with the solvent from the reaction chamber 2 and recovered by the use of a solid--liquid separator 3 such as centrifugal filter. The unreacted source liquid separated by the solid- liquid separator 3 is again sent to the source material supplier 1. The particle size, etc., of the obtd, fine powder can be controlled by the intensity, irradiation time, wavelength, etc., of the laser light to be used for irradiation. The obtd, ceramic fine powder has 2-10mum particle size, especially 3-5mum. |
