发明名称 WIRE FEED DEVICE IN WIRE BONDING APPARATUS
摘要 PURPOSE:To stably form a wire loop by a method wherein a tension which is definite as far as possible is exerted on the wire loop which is formed at a wire guided to a bonding tool. CONSTITUTION:A wire bonding apparatus 10 is provided with a wire drawing- out control device 23, a wire slack detection device 22 and a wire driving part 21. The air is blown, by using an air tensioner 25, to a wire 12 which is fed to a bonding tool 15. A wire loop is formed and a definite tension and a definite slack are exerted on the wire. When the slack becomes lower than a predetermined proper range, the slack detection device 22 detects this slack, the control device 23 receives its signal and actuates the driving part 21 and the wire 12 is fed from a spool 11. Thereby, the wire loop can stably be formed.
申请公布号 JPH0458541(A) 申请公布日期 1992.02.25
申请号 JP19900168314 申请日期 1990.06.28
申请人 TOSHIBA SEIKI KK 发明人 KOMAKI YUJI
分类号 H01L21/60 主分类号 H01L21/60
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