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经营范围
发明名称
SEMICONDUCTOR SUBSTRATE CLEANING DEVICE
摘要
申请公布号
JPH0456132(A)
申请公布日期
1992.02.24
申请号
JP19900163829
申请日期
1990.06.21
申请人
NEC KYUSHU LTD
发明人
KIBA TOYOAKI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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