| 摘要 |
<p>PURPOSE:To execute the curved face polishing of a recessed face or projecting face and a surface polishing with one polish-device, by rocking a spindle shaft, moving the spindle shaft horizontally and inclining the spindle shaft. CONSTITUTION:A plate face 3 and the lower face of a work W are opposed and also rocked with the work being vacuum-attracted onto a chuck face 4 to perform polishing, and a projetting face is polished with the center part of the work W being moved to the inner peripheral edge of the plate face 3 by a moving mechanism and also the outer peripheral edge 3a side of the plate face of the lower face of the work W being made at the angle of elevation by an inclination mechanism. Recessed face polishing is then performed with the center of the work W being moved to the outer peripheral edge of the plate face 3 by the moving mechanism and also the inner peripheral edge 3b side of the lower face of the work W being made at the angle of elevation by the inclination mechanism.</p> |
