| 摘要 |
<p>PURPOSE:To enable a photodetector to be lessened in non-sensitive part and element noise by a method wherein a photodetective region is divided into a first to a fourth quadrant through a cross-like fine second electrode and U-shaped grooves. CONSTITUTION:Two U-shaped grooves 8 formed in a compound semiconductor layer 2 so deep as to reach a high resistive substrate 1 are arranged confronting each other, a first electrode 9 is provided to each of the four corners of a region surrounded with the two U-shaped grooves 8, and a cross-like second electrode 10 is provided to the center of the region surrounded with the U-shaped grooves 8 so as to divide the region concerned into four regions corresponding to the first electrodes 9 respectively, and furthermore an anodic oxide film is formed onto all the surface of the compound semiconductor layer 2 as a surface protective film. As the photodetective surface is separated into pixels through the U-shaped grooves 8 and the cross-like second electrode 10, the pixels in each quadrant can be lessened in space between them, so that a photodetector of this design can be sharply lessened in non-sensitive part.</p> |
