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发明名称
VERFAHREN ZUR MONOCHROMATISCHEN LICHTSTRAHLBEARBEITUNG VON STRUKTUREN INTEGRIERTER SCHALTUNGEN
摘要
申请公布号
DD298449(A5)
申请公布日期
1992.02.20
申请号
DD19890330975
申请日期
1989.07.20
申请人
ZENTRUM MIKROELEKTRONIK DRESDEN GMBH,DE
发明人
HILDEBRANDT,BEATE,DE;DOBRITZ,STEPHAN,DE;HAASE,NORBERT,DE;HOLOTA,WOLFGANG,DE
分类号
H01L21/423;(IPC1-7):H01L21/423
主分类号
H01L21/423
代理机构
代理人
主权项
地址
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