METHOD AND DEVICE FOR CONTAMINATION REMOVAL AND COATING FOR ELECTRON BEAM STOP PLATE,申请号JP19900159794-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CONTAMINATION REMOVAL AND COATING FOR ELECTRON BEAM STOP PLATE
摘要
申请公布号	JPH0451448(A)	申请公布日期	1992.02.19
申请号	JP19900159794	申请日期	1990.06.20
申请人	HITACHI NAKASEIKI LTD	发明人	MUTO HIROSHI
分类号	H01J37/34;H01J37/36	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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