| 摘要 |
PURPOSE:To improve heat resistance of the glass by depositing silica fine particles obtained by heating and hydrolyzing a Si compd. containing halogen so as to form a silica glass porous body and doping Al into this porous body. CONSTITUTION:The silica glass porous body is obtained by depositing silica fine particles obtained by heating and hydrolyzing a Si compd. containing halogen in a flame. Then this porous body is impregnated with an alcohol soln. of Al compd. (e.g. AlCl3) and treated in an atmosphere containing water vapor, converted into transparent glass in a dry He gas atmosphere at about 1,400 deg.C and slowly cooled above 1,220 deg.C. Thus, synthesized quartz glass having 5 - 40ppm doped Al can be obtained. |
