摘要 |
PURPOSE:To enhance the adhesive property to plastic optical parts and to improve the durability of the antireflecting film by forming this film into a three-layered structure of a 1st layer and 2nd layer consisting of hafnium oxide and a 3rd layer consisting of silicon dioxide and forming the film by introducing gaseous oxygen at the time of forming the 1st layer. CONSTITUTION:The vapor deposited films of the three-layered structure of the 1st layer and 2nd layers 2, 3 consisting of the hafnium oxide and the 3rd layer 4 consisting of the silicon dioxide are formed on the surface of a plastic lens 1 to constitute the antireflecting film. The gaseous oxygen is introduced and the hafnium oxide of the 1st layer 2 is formed in the oxidizing gaseous atmosphere at the time of forming this film, by which the refractive index of the hafnium oxide of the 1st layer 2 is so controlled as to be smaller than the refractive index of the hafnium oxide of the 2nd layer 3. The antireflecting film having the excellent adhesive property to the plastic optical parts, durability and optical characteristics is obtd. in this way. |