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发明名称
METHOD FOR MEASURING THICKNESS OF THIN LAYER USING ULTRASONIC WAVE
摘要
申请公布号
JPH0442011(A)
申请公布日期
1992.02.12
申请号
JP19900148406
申请日期
1990.06.06
申请人
JGC CORP
发明人
JOSA ITSUO;OTA KOJI
分类号
G01B17/02;G01S15/88
主分类号
G01B17/02
代理机构
代理人
主权项
地址
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