| 摘要 |
PURPOSE:To align positions highly accurately by obtaining the position deviation between a first body and a second body and the interval between the first body and the second body. CONSTITUTION:The relative positions of a first body 1 and a second body 2 are detected. At this time, a deviation amount DELTA and an interval (g) between the two bodies are obtained based on the following combinations. The two amounts depending on the relative deviation amount DELTA between the first body 1 and the second body 2 and the interval (g) between the first body 1 and the second body 2 are combined with the amount which does not depend on both the deviation amount DELTA and the interval (g). Or the amounts depending on the deviation DELTA and the interval (g), the amount depending on only the interval (g) and the amount which does not depend on both of the deviation amount DELTAand the interval (g) are combined. The relative positions of the body 1 and the body 2 are detected by utilizing the deviation amount DELTA and the interval (g). |
