发明名称 MANUFACTURING METHOD AND DEVICE USING IDENTIFICATION NOTICE
摘要 <p>A method includes a plurality of processes for processing intermediary products stepwise by a plurality of processing units arranged at respective processes, thus to manufacture products while carrying intermediary products or carriers for accommodating them therein. This method comprises the steps of reading discrimination codes attached to the intermediary products or carriers prior to the first process, and recording the discrimination codes thus read as basic information and recording processing information in regard to the processings by the processing units at the respective processes in correspondence with the basic information. This method further comprises the step of selecting one processing unit from a plurality of processing units at the process of the next state on the basis of the processing information recorded. There is also provided an apparatus for implementing the above method, which includes supervisory control means for carrying out selective control of processing units. Thus, a manufacturing method and an apparatus therefor capable of implementing efficient manufacturing processing can be realized.</p>
申请公布号 KR920001028(B1) 申请公布日期 1992.02.01
申请号 KR19880002942 申请日期 1988.03.19
申请人 TOSHIBA CORP. 发明人 HUKASAWA, YOSIHITO
分类号 H01L21/52;B23Q41/00;G05B19/12;G05B19/418;H01L21/02;H01L21/50;(IPC1-7):H01L21/00 主分类号 H01L21/52
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