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发明名称
BOAT FOR LIQUID PHASE EPITAXIAL GLOWTH
摘要
申请公布号
JPH0416590(A)
申请公布日期
1992.01.21
申请号
JP19900120830
申请日期
1990.05.09
申请人
SUMITOMO ELECTRIC IND LTD
发明人
HANEKI YOSHIAKI
分类号
C30B19/06;C30B29/42;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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