| 摘要 |
PURPOSE:To improve the mold-releasing property of a disk substrate by forming an electroplating nickel layer so that the layer has such crystallinity with >=800,000 cps X-ray diffraction peak intensity for the [111] plane, and selecting the orientation index of each orientation plane of the crystal. CONSTITUTION:The mold-releasing property of the stamper is largely affected by the crystallinity and crystalline orientation of a nickel electroplating layer which lines the surface layer. The crystalline property of a nickel stamper having good mold-releasing property are as follows: >=800,000 cps X-ray diffrac tion peak intensity for the [111] plane, and the orientation index of 0.70 - 0.85 for [111] plane, 1.60 - 1.90 for [200] plane, 0.70 - 1.25 for [220] plane, 0.35 - 0.70 for [311] plane. To obtain a nickel stamper of this crystalline property, proper electroplating liquid composition and electroplating conditions are selected, such as nickel sulfamin acid 440 g/l, boronic acid 40 g/l, pitting preven tive 0.001%, pH 4.0 and 50 deg.C bath temp. |
