| 摘要 |
PURPOSE:To obtain an electrically conductive zinc oxide sintered body target for sputtering having high density and low resistance by sintering a mixture of a decomposable compd. of an element having +3 or higher valence with zinc oxide at a prescribed temp. so that the melt sticking of grains is inhibited. CONSTITUTION:A decomposable or volatile compd. (e.g. halide) of an element (e.g. Se, Y, B, Al, Ga, In, Te, Ti, Zr or Hf) having +3 or higher valence is prepd. and mixed with zinc oxide and this mixture is sintered at <=1,400 deg.C in an inert atmosphere to obtain an electrically conductive zinc oxide sintered body target for sputtering having 5-5.5 g/cm<3> sintering density and 10-1X10<-3>OMEGA.cm specific resistance and free from melt sticking at the interface between the sintered grains. |
