| 摘要 |
PURPOSE:To make discrimination of a quasi-error from a verified error unnecessary and to obviate omission of verification of an error to be originally verified by subtracting already verified error data from error data in which reference dimensions have been checked with original data. CONSTITUTION:In a process for verifying whether dimensions of graphics of a mask pattern are reference dimensions or larger or not, a replacing step of registered data having three steps of registering error data generated in designed oil mask pattern, input of necessary data, collating with common sell error data, and forming a mask pattern formed of error data, and a subtracting step of confirmed error from confirmed result of an original having three steps of widening mask pattern data formed of error data, widening error data in which reference dimensions of the original data are checked, and performing logical calculation are provided. |
